Characterization of Microstrip Waveguides in Silicon up to 80 GHz

"A monolithically integrated microstrip waveguide in a 0.5 \u00b5m, Si bipolar technology is presented. This single microstrip line is a common type of on chip interconnnect. The waveguide is characterized by S-parameter measurement in a frequency range from 100 MHz to 80 GHz. After deembedding the characteristic impedance, propagation constant and telegraphers equation transmission parameter are extracted. Measurement Results are compared to simulation results in detail."